Main Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics
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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.
Request Code : ZLIBIO4442532
Categories:
Year:
2021
Edition:
1
Publisher:
Elsevier; Woodhead Publishing
Language:
English
Pages:
426
ISBN 10:
0128202556
ISBN 13:
9780128202562
ISBN:
0128202564,0128202556,9780128202555,9780
Series:
Woodhead Publishing Series in Electronic and Optical Materials

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