Main Handbook of Microlithography, Micromachining, and Microfabrication
Handbook of Microlithography, Micromachining, and Microfabrication cover

Handbook of Microlithography, Micromachining, and Microfabrication

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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
Request Code : ZLIBIO4305055
Categories:
Volume:
Volume 1: Microlithography
Year:
1997
Edition:
1
Publisher:
SPIE Press
Language:
English
Pages:
780
ISBN 10:
0819423785
ISBN 13:
9780819423788
ISBN:
0819423785,9780819423788
Series:
PM39

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