Main Design, Test, and Microfabrication of MEMS and MOEMS

Design, Test, and Microfabrication of MEMS and MOEMS

Name: Design, Test, and Microfabrication of MEMS and MOEMS
Rating: 5.0 (4 reviews)

Sarkisov, Sergey S.; Darwish, Abdalla M.; Abdeldayem, Hossin A.; Adamovsky, Grigory; Kulishov, Mykola B.; Banks, Curtis E.; Wang, JaChing; Courtois, Bernard; Crary, Selden B.; Ehrfeld, Wolfgang; Fujita, Hiroyuki; Karam, Jean Michel; Markus, Karen W.

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Request Code : ZLIB.IO18122606

Categories:

Year:

2022

Publisher:

SPIE

Language:

English

Series:

vol. 3680

Official сhannel

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Design, Test, and Microfabrication of MEMS and MOEMS

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