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The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
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The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
Sturmann, J.; Junge, S.; Benecke, W.; Zampolli, S.; Nicoletti, S.
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