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Microelectronic Device Technology III
Microelectronic Device Technology III
Kokhanenko, Andrej P.; Korotaev, Aleksander G.; Voitsekhovskii, Aleksander V.; Grushin, Ivan; Opekunov, Mikhail S.; Remnev, Gennady E.; Burnett, David; Tsuchiya, Toshiaki
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