Main Ultra clean processing of semiconductor surfaces IX (UCPSS 2008) : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008
Ultra clean processing of semiconductor surfaces IX (UCPSS 2008) : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008 cover

Ultra clean processing of semiconductor surfaces IX (UCPSS 2008) : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008

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Request Code : ZLIBIO1192406
Categories:
Year:
2009
Publisher:
Trans Tech
Language:
English
Pages:
396 pages : illustrations (some color)
ISBN 10:
3038132829
ISBN 13:
9783038132820
ISBN:
9783038132820,3038132829
Series:
Diffusion and defect data., Pt. B,, Solid state phenomena ;, v. 145-146

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