Main C,H,N and O in Si and Characterization and Simulation of Materials and Processes

C,H,N and O in Si and Characterization and Simulation of Materials and Processes

Name: C,H,N and O in Si and Characterization and Simulation of Materials and Processes
Rating: 4.0 (4 reviews)
ISBN: 9780444596338

A. Borghesi, U.M. Gösele, J. Vanhellemont, A.M. Gué and M. Djafari-Rouhani (Eds.)

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Categories:

Year:

1996

Publisher:

Elsevier

Language:

English

Pages:

564

ISBN 10:

044459633X

ISBN 13:

9780444596338

ISBN:

978-0-444-82413-4,9780444596338,044459633X

Series:

European Materials Research Society symposia proceedings, v. 56

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