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Physical and Technical Problems of SOI Structures and Devices

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In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.


Request Code : ZLIBIO959626
Categories:
Year:
1995
Edition:
1
Publisher:
Springer Netherlands
Language:
English
Pages:
290
ISBN:
978-94-010-4052-5,978-94-011-0109-7
Series:
NATO ASI Series 4
This book is not available due to the complaint of the copyright holder.

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